Excimer Laser Ablation – a Novel Patterning Solution for Advanced Packaging
نویسندگان
چکیده
منابع مشابه
Laser Ablation – Emerging Patterning Technology for Advanced Packaging
INTRODUCTION Wafer Level Packages have emerged as the fastest growing semiconductor packaging technology. Rather than a single solution, wafer level packaging technologies are a set of different solutions including flip-chip wafer bumping, electroplated gold, solder bumps and recent copper pillar technologies. These chips can be
متن کاملEmbedded Trench Redistribution Layers at 2–5 μm Width and Space by Excimer Laser Ablation and Surface Planer Processes for 20–40 μm I/O Pitch Interposers
This paper reports on one of the first demonstrations of the formation and metallization of 2–5-μm lines and spaces by an embedded trench method in two dry-film polymer dielectrics, Ajinomoto build-up film and preimidized polyimide, without using chemical mechanical planarization. The trenches and vias in 8–15-μm-thick dry-film dielectrics were formed by 308-nm excimer laser ablation, followed ...
متن کاملExcimer Laser Projection Micromachining of Polyimide Thin Films Annealed at Different Temperatures - Components, Packaging, and Manufacturing Technology, Part C, IEEE Transactions on
A KrF excimer laser projection micromachining tool has been designed and implemented aiming to accomplish onestep etching with micron resolution for applications such as chip module packaging and polyimide technology in semiconductor manufacturing. Two polyimide (Probimide 7020) thin films spun on the silicon wafers are annealed at 100 C and 400 C, respectively, in order to investigate the effe...
متن کاملEtching of transparent materials by laser ablation of an organic solution
Transparent materials such as fused silica and quartz crystal were etched upon irradiation of an organic solution containing pyrene, using a conventional KrF or XeCl excimer laser. Threshold fluence for etching was 240mJ/cm for fused silica, which was remarkably low compared with that of direct ablation using conventional lasers. The etch rates depended on the concentration of pyrene. The mecha...
متن کامل193 nm excimer laser sclerostomy in pseudophakic patients with advanced open angle glaucoma.
A modified open mask system incorporating an en face air jet to dry the target area during ablation and a conjunctival plication mechanism, which allows ab externo delivery of the 193 nm excimer laser without prior conjunctival dissection, has been developed to form small bore sclerostomies accurately and atraumatically. Full thickness sclerostomies, and sclerostomies guarded by a smaller inter...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2015